au.\*:("CANARD, T")
Results 1 to 1 of 1
Selection :
Compatibility of polysilicon with HFO2-BASED gate dielectrics for CMOS applicationsKAUSHIK, V. S; DEGENDT, S; CARTER, R et al.Proceedings - Electrochemical Society. 2003, pp 391-396, issn 0161-6374, isbn 1-56677-376-8, 6 p.Conference Paper